Dynamic dispersing technique for PR coating process in planar lightwave circuit fabrication

Pua, Chang Hong and Harun, Sulaiman Wadi and Chong, Wu Yi and Jayapalan, Kanesh Kumar and Ahmad, Harith (2007) Dynamic dispersing technique for PR coating process in planar lightwave circuit fabrication. Microwave and Optical Technology Letters, 49 (8). pp. 1993-1995. ISSN 0895-2477

Full text not available from this repository.
Official URL: http://dx.doi.org/10.1002/mop.22609

Abstract

A new dynamic dispersing technique (DDT) is proposed and demonstrated to improve the photoresist (PR) coating process in planar lightwave circuit (PLC) fabrication. In this technique, the PR is dispensed during the wafer's spin cycle on the spin coaler instead of the conventional static dispensing before spinning. In comparison to the conventional static dispersing technique (SDT), DDT has significantly improved several properties of the PR layer including its thinning behavior, coating uniformity, and PR amount. Using DDT, the PR thickness averagely reduces by -0.2 μm. The radial uniformity of the PR from the centre is also improved from the average difference of 0.28 μm in SDT to 0.14 μm in DDT. Furthermore, the PR amount required for the coating process is reduced from 3.00 ml (SDT) to 0.25 ml (DDT). Two different DDTs are also compared in this paper including the application of PR during the spin cooler's acceleration step (Ist DDT) and the application of PR during the spin coaler's constant speed (2nd DDT).

Item Type: Article
Uncontrolled Keywords: Dynamic dispensing; Photoresist (PR) coating; Planar lightwave circuit (PLC); Spin coating; Static dispensing
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Divisions: Faculty of Engineering
Faculty of Science > Dept of Physics
Depositing User: Ms. Juhaida Abd Rahim
Date Deposited: 17 Oct 2018 05:08
Last Modified: 17 Oct 2018 05:08
URI: http://eprints.um.edu.my/id/eprint/19681

Actions (login required)

View Item View Item